Publication:
Atom probe tomography analysis of SiGe fins embedded in SiO2: facts and artefacts
Date
Loading...
Journal
Abstract
Description
Statistics
Views
2022 since deposited on 2021-10-24
1last month
Acq. date: 2026-08-15
Citations
Statistics
Views
2022 since deposited on 2021-10-24
1last month
Acq. date: 2026-08-15
Citations