Publication:

Co and Ru dual damascene compatible metallization studies

Date

2019

Proceedings Paper

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Author(s)

van der Veen, Marleen

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;

Lariviere, Stephane

;

Vega Gonzalez, Victor

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;

;

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;

Philipsen, Harold

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;

Adelmann, Christoph

;

Vanstreels, Kris

;

Jourdan, Nicolas

;

Holsteyns, Frank

;

Struyf, Herbert

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;

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Acq. date: 2026-08-19