Publication:

Moore's Law meets High-NA EUV: Random via patterning for next-generation nodes

Date

2025
Proceedings Paper
https://doi.org/10.1117/12.3050453
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Author(s)

Chowrira Poovanna, Bhavishya  
;
Blanco, Victor  
;
Dusa, Mircea  
;
Tan, Ling Ee  
;
Vats, H.
;
Gillijns, Werner  
;
Decoster, Stefan  
;
Niroomand, Ardavan  
;
Rutigliani, Vito  
;
Halder, Sandip  
;
Sangghaleh, Mahtab  
;
Tyagi, Dhruv  
;
Kamali, Ali  
;
Newman, Marcus  
;
Demand, M.
;
Wako, Y.
;
Negreira, A.
;
Clark, R.
;
Nafus, K.
;
O'Toole, M.
;
Hsia, J.

Journal

Proceedings of SPIE

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52 since deposited on 2025-07-31
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Acq. date: 2026-08-15

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52 since deposited on 2025-07-31
3last month
Acq. date: 2026-08-15

Citations