Publication:
Exploration of Alternative Mask for 0.33NA EUV Single Patterning at Pitch 28nm
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188 since deposited on 2022-05-22
31last month
10last week
Acq. date: 2026-08-19
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1691 since deposited on 2022-05-22
5last month
1last week
Acq. date: 2026-08-19
Citations