Publication:
Exploration of Alternative Mask for 0.33NA EUV Single Patterning at Pitch 28nm
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223 since deposited on 2022-05-22
25last month
9last week
Acq. date: 2026-10-13
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1694 since deposited on 2022-05-22
3last month
Acq. date: 2026-10-13
Citations