Publication:
Correlation between solvent diffusion, porosity and pore sealing for low k dielectrics
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2004 since deposited on 2021-10-15
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Acq. date: 2026-08-18
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Statistics
Views
2004 since deposited on 2021-10-15
2last month
1last week
Acq. date: 2026-08-18
Citations