Publication:

Experimental evaluation of the impact of carbon nanotube EUV pellicles on reticle imaging

Date

2019
Journal article
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Author(s)

Mochi, Iacopo
;
Timmermans, Marina  
;
Gallagher, Emily  
;
Mariano, Marina  
;
Pollentier, Ivan  
;
Rajendran, Rajeev
;
Helfenstein, Patrick
;
Fernandez, Sara
;
Kazazis, Dimitrios
;
Ekinci, Yasin

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

Abstract

Description

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1976 since deposited on 2021-10-27
2last month
Acq. date: 2026-08-20

Citations