Publication:

Back-end, low-k dielectric compatible resist rework procedure

Date

2002
Presentation
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Reybrouck, Mario  
;
Vangoidsenhoven, Diziana  
;
Maenhoudt, Mireille
;
Van Aelst, Joke  
;
Boullart, Werner  

Journal

Abstract

Description

Statistics

Views

2096 since deposited on 2021-10-14
2last month
Acq. date: 2026-08-22

Citations

Statistics

Views

2096 since deposited on 2021-10-14
2last month
Acq. date: 2026-08-22

Citations