Publication:

Directional Etching of Barrierless NiAl Lines on 300-mm Wafers for Interconnects Applications

Date

2024
Journal article
https://doi.org/10.1109/led.2024.3449219
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Author(s)

Kundu, Souvik  
;
Soulie, Jean-Philippe  
;
Marti, Giulio  
;
Ulu Okudur, Fulya  
;
Kundu, Shreya  
;
Souriau, Laurent  
;
Lazzarino, Frederic  
;
Murdoch, Gayle  
;
Park, Seongho  
;
Tokei, Zsolt  

Journal

IEEE ELECTRON DEVICE LETTERS

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91 since deposited on 2024-11-30
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Acq. date: 2026-08-19

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