Publication:
Chlorine detection and quantification in ALCVD HfO2 high-k dielectric films using total reflection X-ray fluorescence spectrometry
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1969 since deposited on 2021-10-15
1last month
Acq. date: 2026-05-30
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Statistics
Views
1969 since deposited on 2021-10-15
1last month
Acq. date: 2026-05-30
Citations