Publication:

Reliability issues in high-k stacks

Date

2004

Proceedings Paper

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Author(s)

Degraeve, Robin

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Kerber, Andreas

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Cartier, Eduard

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Kauerauf, Thomas

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Roussel, Philippe

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Autran, Jean-Luc

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Pourtois, Geoffrey

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Pantisano, Luigi

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De Gendt, Stefan

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;

Groeseneken, Guido

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Acq. date: 2026-08-20