Publication:

LCDU and placement improvement of contacts using EUV templated DSA

Date

2018
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Author(s)

Boeckx, Carolien
;
Doise, Jan  
;
Chan, BT  
;
Lorusso, Gian  
;
Sutani, Takumichi
;
Koshihara, Shunsuke
;
Ishimoto, Toru
;
Kato, Takeshi
;
Rincon Delgadillo, Paulina  
;
De Gendt, Stefan  

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2019 since deposited on 2021-10-25
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