Publication:
Integration of a k=2.3 spin-on polymer for the sub-28nm technology node
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1934 since deposited on 2021-10-20
4last month
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Acq. date: 2026-10-13
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Statistics
Views
1934 since deposited on 2021-10-20
4last month
2last week
Acq. date: 2026-10-13
Citations