Publication:
Repair and sealing of mesoporous low-k dielectric by supercritical CO2 processing
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1922 since deposited on 2021-10-16
1last month
Acq. date: 2026-06-04
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Statistics
Views
1922 since deposited on 2021-10-16
1last month
Acq. date: 2026-06-04
Citations