Publication:
Repair and sealing of mesoporous low-k dielectric by supercritical CO2 processing
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1929 since deposited on 2021-10-16
5last month
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Acq. date: 2026-08-16
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Statistics
Views
1929 since deposited on 2021-10-16
5last month
1last week
Acq. date: 2026-08-16
Citations