Publication:

Selective wet removal of Hf-based layers and post-dry etch residues in high-k and metal gate stacks

Date

2005

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

;

Paraschiv, Vasile

;

;

;

;

Garaud, Sylvain

;

;

;

;

Boullart, Werner

;

De Gendt, Stefan

Statistics

1911 since deposited on 2021-10-16

3last month

Acq. date: 2026-08-20