Publication:
Impact of LKD5109 low-k to cap/liner interfaces in single damascene process and performance
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1925 since deposited on 2021-10-15
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Acq. date: 2026-08-17
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Statistics
Views
1925 since deposited on 2021-10-15
1last month
1last week
Acq. date: 2026-08-17
Citations