Update on main chain scission resists in Zeon for high-NA EUV lithography

Publication:

2023

Proceedings Paper

Author(s)

Shirotori, Akihide

;

Oda, Yuji

;

Taguchi, Kazunori

;

;

;

;

;

Sanuki, Hideaki

Proceedings of SPIE

903 since deposited on 2024-01-13

1last month

Acq. date: 2026-06-02