Publication:

Optimization of Retention in Ferroelectricity Boosted Gate Stacks for 3D NAND

Date

2023

Proceedings Paper

https://doi.org/10.1109/imw56887.2023.10145986

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Author(s)

Breuil, Laurent

;

Popovici, Mihaela Ioana

;

;

Arreghini, Antonio

;

;

Van den Bosch, Geert

;

;

Rosmeulen, Maarten

Journal

N/A

Statistics

853 since deposited on 2023-07-28

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Acq. date: 2026-08-19