Publication:

Low-Voltage Aberration-Corrected SEM Metrology of Thin Resist for High-NA EUVL

Date

2022

Proceedings Paper

https://doi.org/10.1117/12.2613990

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Author(s)

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Fischer, Daniel

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De Simone, Danilo

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Muellender, Angelika

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Charley, Anne-Laure

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Leray, Philippe

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De Gendt, Stefan

Journal

Proceedings of SPIE

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1485 since deposited on 2022-09-08

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Acq. date: 2026-10-13