Publication:

Novel processing technologies for advanced EUV patterning materials using metal oxide resist (MOR)

Date

2021
Proceedings Paper
https://doi.org/10.1117/12.2583809
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Author(s)

Onitsuka, Tomoya
;
Kawakami, Shinichiro
;
Dauendorffer, Arnaud
;
Shimura, Satoru
;
Nafus, Kathleen
;
Feurprier, Yannick
;
Foubert, Philippe  
;
De Simone, Danilo  

Journal

Proceedings of SPIE

Abstract

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1473 since deposited on 2021-11-02
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Acq. date: 2026-10-13

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