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Thin-film MCM-D technology with through-substrate vias for the integration of 3D SiP modules

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1883 since deposited on 2021-10-17
2last month
Acq. date: 2026-08-18

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Views

1883 since deposited on 2021-10-17
2last month
Acq. date: 2026-08-18

Citations