Publication:
A new generic surface micromachining module for MEMS hermetic packaging at temperatures below 200° C
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1864 since deposited on 2021-10-16
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Acq. date: 2026-10-12
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Statistics
Views
1864 since deposited on 2021-10-16
2last month
1last week
Acq. date: 2026-10-12
Citations