Publication:
Strained Si and strained SiGe fabrication schemes using (selective) epitaxial growth in a RPCVD system
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1923 since deposited on 2021-10-15
3last month
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Acq. date: 2026-08-17
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Statistics
Views
1923 since deposited on 2021-10-15
3last month
1last week
Acq. date: 2026-08-17
Citations