Publication:

Atom probe analysis of a 3D-finfet with high-k metal gate

Date

2011
Journal article
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Author(s)

Gilbert, Matthieu
;
Vandervorst, Wilfried  
;
Koelling, Sebastian
;
Kambham, Ajay Kumar

Journal

Ultramicroscopy

Abstract

Description

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1962 since deposited on 2021-10-19
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Acq. date: 2026-10-13

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1962 since deposited on 2021-10-19
2last month
Acq. date: 2026-10-13

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