Publication:

Hydrogen induced positive charge in Hf-based dielectrics

Date

2007

Journal article

Simple item page Full metadata Statistics

Files

15894.pdf 243.58 KB

Author(s)

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Zahid, Mohammed

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Groeseneken, Guido

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Pantisano, Luigi

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Degraeve, Robin

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De Gendt, Stefan

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Journal

Microelectronic Engineering

Statistics

1996 since deposited on 2021-10-16

Acq. date: 2026-06-05