Publication:
Experimental and theoretical studies of radical production in RF CCP discharge at 81-MHz frequency in Ar/CF4 and Ar/CHF3 mixtures
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1975 since deposited on 2021-10-18
2last month
1last week
Acq. date: 2026-08-15
Citations
Statistics
Views
1975 since deposited on 2021-10-18
2last month
1last week
Acq. date: 2026-08-15
Citations