Publication:
Atomic layer etching of amorphous Si on MoS2 for selectively patterned MX2 heterostructures
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1961 since deposited on 2021-10-24
Acq. date: 2026-05-31
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Statistics
Views
1961 since deposited on 2021-10-24
Acq. date: 2026-05-31
Citations