Publication:
N-type VT tuning by Te ion implantation in moly-based metal gates with high-k dielectric for fully depleted devices
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
2039 since deposited on 2021-10-17
2last month
Acq. date: 2026-08-15
Citations
Statistics
Views
2039 since deposited on 2021-10-17
2last month
Acq. date: 2026-08-15
Citations