Publication:

Metrology of Thin Resist for High NA EUVL

Date

2022
Proceedings Paper
https://doi.org/10.1117/12.2614046
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Author(s)

Lorusso, Gian  
;
Beral, Christophe  
;
Bogdanowicz, Janusz  
;
De Simone, Danilo  
;
Hasan, Mahmudul  
;
Jehoul, Christiane  
;
Moussa, Alain  
;
Saib, Mohamed  
;
Zidan, Mohamed  
;
Severi, Joren  
;
Truffert, Vincent  
;
Van Den Heuvel, Dieter  
;
Goldenshtein, Alex
;
Houchens, Kevin
;
Santoro, Gaetano
;
Fischer, Daniel
;
Muellender, Angelika
;
Hung, Joey
;
Koret, Roy
;
Turovets, Igor
;
Ausschnitte, Kit
;
Mack, Chris
;
Kondo, Tsuyoshi
;
Shohjoh, Tomoyasu
;
Ikota, Masami
;
Charley, Anne-Laure  
;
Leray, Philippe  

Journal

Proceedings of SPIE

Abstract

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1437 since deposited on 2022-09-08
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Acq. date: 2026-10-13

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