Publication:

Atomic layer deposition of strontium titanate films using Sr(tBu3Cp)2 and Ti(OMe)4

Date

2010
Journal article
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18411.pdf 282.87 KB

Author(s)

Popovici, Mihaela Ioana  
;
Van Elshocht, Sven  
;
Menou, Nicolas
;
Swerts, Johan  
;
Pierreux, Dieter  
;
Delabie, Annelies  
;
Brijs, Bert
;
Conard, Thierry  
;
Opsomer, Karl  
;
Maes, Jan  
;
Wouters, Dirk
;
Kittl, Jorge

Journal

Journal of the Electrochemical Society

Abstract

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