Publication:

Process Development and Characterization of Ru-based UBM for In Bumps Integration for Quantum Computing Applications

Date

2024

Proceedings Paper

https://doi.org/10.1109/ECTC51529.2024.00068

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Author(s)

Le Tulzo, Harold

;

;

;

Gallegos, Anthony

;

Thomas, Candice

;

Deschaseaux, Edouard

;

Feautrier, Celine

;

Charbonnier, Jean

;

Gueugnot, Alain

;

Derakhshandeh, Jaber

;

Hussain, Tassawar

;

Journal

N/A

Statistics

93 since deposited on 2024-12-07

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Acq. date: 2026-06-02