Publication:
Optimization of reactive ion etching of Al0.48In0.52As in CH4/H2 by the experimental design method
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
2101 since deposited on 2021-09-29
4last month
1last week
Acq. date: 2026-08-17
Citations
Statistics
Views
2101 since deposited on 2021-09-29
4last month
1last week
Acq. date: 2026-08-17
Citations