Publication:
Quantification of high-K nanolayers for semiconductor applications using synchrotron radiation and calibrated instrumentation
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1944 since deposited on 2021-10-22
1last month
Acq. date: 2026-08-17
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Statistics
Views
1944 since deposited on 2021-10-22
1last month
Acq. date: 2026-08-17
Citations