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Crystallisation and tetragonal-monoclinic transformation in ZrO2 and HfO2 dielectric thin films

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2078 since deposited on 2021-10-15
1last month
Acq. date: 2026-05-30

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2078 since deposited on 2021-10-15
1last month
Acq. date: 2026-05-30

Citations