Publication:

Single chemistry cleaning solution for advanced wafer cleaning

Date

2001

Proceedings Paper

Simple item page Full metadata Statistics

Files

5853.pdf 237.63 KB

Author(s)

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Kolbesen, B. O.

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De Gendt, Stefan

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Statistics

1940 since deposited on 2021-10-14

5last month

Acq. date: 2026-05-29