Publication:

Characterization and integration of a new Si-O-C film deposited by CVD

Date

2001

Proceedings Paper

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Author(s)

Alves Donaton, Ricardo

;

Struyf, Herbert

;

;

Coenegrachts, Bart

;

Stucchi, Michele

;

De Roest, David

;

Baklanov, Mikhaïl

;

Vanhaelemeersch, Serge

;

;

;

;

;

;

;

Van Autryve, Luc

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Acq. date: 2026-10-12