Publication:
Scaling down thickness of ULK materials for 65 node and below and its efect on electrical performance
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1926 since deposited on 2021-10-16
4last month
Acq. date: 2026-08-19
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Statistics
Views
1926 since deposited on 2021-10-16
4last month
Acq. date: 2026-08-19
Citations