Publication:

New approach to optical proximity correction

Date

1998
Proceedings Paper
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Author(s)

Rosenbusch, A.
;
Hourd, A.
;
Juffermans, C.
;
Kirsch, H.
;
Lalanne, F.
;
Maurer, W.
;
Romeo, C.
;
Ronse, Kurt  
;
Schiavone, P.
;
Simecek, M.
;
Toublan, O.
;
Watson, J.
;
Ziegler, W.
;
Zimmermann, R.

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1973 since deposited on 2021-10-01
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