Publication:
A calibrated FEM study of the influence of line width, line spacing and dielectric E modulus on stress and stress gradients in BEOL copper interconnects
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2051 since deposited on 2021-10-20
3last month
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Acq. date: 2026-08-17
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Statistics
Views
2051 since deposited on 2021-10-20
3last month
1last week
Acq. date: 2026-08-17
Citations