Publication:

Assessing stability of metal tellurides as alternative photomask materials for extreme ultraviolet lithography

Date

2019
Journal article
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Author(s)

Luong, Vu  
;
Philipsen, Vicky  
;
Opsomer, Karl  
;
Rip, Jens  
;
Hendrickx, Eric  
;
Heyns, Marc  
;
Detavernier, Christophe
;
Laubis, Christian
;
Scholze, Frank

Journal

Journal of Vacuum Science and Technology B

Abstract

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