Laboratory-based 3D X-ray standing-wave analysis of nanometre-scale gratings

Matveevskii, Ksenia; Nikolaev, Konstantin V.; Fallica, Roberto; Beckers, Detlef; Gateshki, Milen; Kharchenko, Alexander; Spanjer, Bart; Rogachev, Alexander; Yakunin, Sergey; Ackermann, Marcelo; Makhotkin, Igor A.

doi:10.1107/s1600576724007179

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Laboratory-based 3D X-ray standing-wave analysis of nanometre-scale gratings

Date

2024

Journal article

https://doi.org/10.1107/s1600576724007179

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Matveevskii, Ksenia

;

Nikolaev, Konstantin V.

;

Fallica, Roberto

;

Beckers, Detlef

;

Gateshki, Milen

;

Kharchenko, Alexander

;

;

;

;

;

Journal

JOURNAL OF APPLIED CRYSTALLOGRAPHY

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98 since deposited on 2024-11-24

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Acq. date: 2026-08-19

153 since deposited on 2024-11-24

Acq. date: 2026-08-19

Laboratory-based 3D X-ray standing-wave analysis of nanometre-scale gratings

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