Publication:
Gas-phase pore stuffing for low-damage patterning of organo-silicate glass dielectric materials
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2009 since deposited on 2021-10-25
2last month
Acq. date: 2026-06-01
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Statistics
Views
2009 since deposited on 2021-10-25
2last month
Acq. date: 2026-06-01
Citations