Publication:

Scalable Nano-Opto-Electromechanical Systems in Silicon Photonics

Date

2021

Proceedings Paper

https://doi.org/10.1109/IPC48725.2021.9593009

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Author(s)

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Takabayashi, Alain Yuji

;

;

Edinger, Pierre

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Gylfason, Kristinn B.

;

;

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Verheyen, Peter

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Jezzini, Moises

;

Khan, Muhammad Umar

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Journal

na

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Acq. date: 2026-06-01