Publication:
Impact of ALD grown passivation layers on silicon nitride based integrated optic devices for very-near-infrared wavelengths
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
1874 since deposited on 2021-10-22
2last month
1last week
Acq. date: 2026-08-15
Citations
Statistics
Views
1874 since deposited on 2021-10-22
2last month
1last week
Acq. date: 2026-08-15
Citations