Publication:

Characterization of 248nm deep ultraviolet (DUV) photoresist after ion implantation

Date

2009
Meeting abstract
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Author(s)

Tsvetanova, Diana  
;
Vos, Rita  
;
Vereecke, Guy  
;
Clemente, Francesca
;
Vanstreels, Kris  
;
Conard, Thierry  
;
Parac-Vogt, Tatjana
;
Mertens, Paul  
;
Heyns, Marc  

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