Publication:

e-beam Metrology for High-NA: Revisiting the imec Protocol

Date

2025

Proceedings Paper

https://doi.org/10.1117/12.3052366

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Author(s)

Lorusso, Gian Francesco

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Habashieh, Sahel

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Van Den Heuvel, Dieter

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Vangoidsenhoven, Diziana

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De Simone, Danilo

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Foubert, Philippe

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Charley, Anne-Laure

Journal

Proceedings of SPIE

Statistics

112 since deposited on 2025-07-28

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Acq. date: 2026-10-13