Publication:

Defect spectroscopy of sidewall interfaces in gate-all-around silicon nanosheet FET

Date

2021
Journal article
https://doi.org/10.1088/1361-6528/abd278
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Author(s)

Lee, Kookjin  
;
Kim, Yeonsu
;
Lee, Hyebin
;
Park, Sojeong
;
Lee, Yongwoo
;
Joo, Min-Kyu
;
Ji, Hyunjin
;
Lee, Jaewoo
;
Chun, Jungu
;
Sung, Moonsoo
;
Cho, Young-Hoon
;
Kim, Doyoon
;
Choi, Junhee
;
Lee, Jae Woo
;
Jeon, Dae-Young
;
Choi, Sung-Jin
;
Kim, Gyu-Tae

Journal

NANOTECHNOLOGY

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1595 since deposited on 2021-11-02
3last month
Acq. date: 2026-10-13

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1595 since deposited on 2021-11-02
3last month
Acq. date: 2026-10-13

Citations