Publication:

Evaluation of Nb(Si)N as metal gate material

Date

2005

Meeting abstract

Simple item page Full metadata Statistics

Author(s)

Van Hoornick, Nausikaa

;

De Witte, Hilde

;

Witters, Thomas

;

;

Conard, Thierry

;

;

;

;

;

De Gendt, Stefan

;

Statistics

1986 since deposited on 2021-10-16

1last month

Acq. date: 2026-05-29