Publication:

Metallization of sub- 30 nm Interconnects: Comparison of different liner/seed combinations

Date

2009

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

Carbonell, Laure

;

;

;

Kellens, Kristof

;

Caluwaerts, Rudy

;

Devriendt, Katia

;

Altamirano Sanchez, Efrain

;

Wouters, Johan M. D.

;

Gravey, Virginie

;

;

;

Sundarrajan, Arvind

;

;

Aubuchon, Joseph

;

;

Narasimhan, Murali

;

Cockburn, Andrew

;

;

Statistics

1941 since deposited on 2021-10-17

1last month

Acq. date: 2026-06-01