Publication:
Atomic layer deposition of hafnium oxide on Ge and GaAs substrates: precursors and surface preparation
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1995 since deposited on 2021-10-17
3last month
Acq. date: 2026-08-18
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Statistics
Views
1995 since deposited on 2021-10-17
3last month
Acq. date: 2026-08-18
Citations