Publication:

Ar and H2 plasma and neutral/ion beam treatment of EUV resist

Date

2015

Proceedings Paper

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30400.pdf 958.06 KB

Author(s)

De Schepper, Peter

;

Marinov, Daniil

;

;

Altamirano Sanchez, Efrain

;

de Marneffe, Jean-Francois

;

De Gendt, Stefan

;

Braithwaite, Nicholas St. J.

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1946 since deposited on 2021-10-22

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Acq. date: 2026-08-16